許多半導體廠邁向智慧化的過程中，開始發(fā)現(xiàn)環(huán)境中存在肉眼看不到的微污染物，它們懸浮在空氣中，對產品造成莫大傷害，但傳統(tǒng)HEPA或ULPA等過濾方式卻難以有效去除；因而亟思在廠區(qū)內布建智慧化管控機制，以解決AMC(Airborne Molecular Contamination)問題。

普拉愛爾技術專家熊偉表示，隨著半導體先進制程的發(fā)展，透過傳統(tǒng)過濾方式，已能有效控制空氣中懸浮的粉塵；但相較于粉塵，其他有機或無機的微污染物，對制程良率則有更巨大的影響。換言之高效能AMC微污染控制技術，是目前半導體大廠發(fā)展5奈米先進制程的關鍵要素之一。

AMC主要分為MA酸性物質、MB咸性物質、MC凝結性物質及MD摻加物質，及H?O?、O?等無法歸類者，這些氣態(tài)分子污染物，以尺寸來看僅需要5~25個分子沉積，便可占滿5奈米線寬，導致該晶片損壞，這是目前半導體業(yè)者面臨大的難題。

為解決此問題，化學濾網從業(yè)者在傳統(tǒng)粉塵濾網外疊加多效化學濾網，亦即傳統(tǒng)三合一化學濾網模組模。但它延伸出莫大問題，即業(yè)者為確保效能達到高水準，因而采用大量PU膠將濾網封在金屬框內，一來PU膠本身就釋出污染源，二來礙于金屬與濾材被黏死而無法更換，最終只會淪為復合型態(tài)的廢棄物。

銳智研發(fā)的環(huán)保組合式濾網，則呈現(xiàn)截然不同風貌。我司將歸納它擁有諸多優(yōu)勢，首先完全不使用PU膠、讓用戶因而節(jié)省3%~5%成本。其次將框體設計為獨特的抽取式或堆疊式，方便用戶僅需替換單層濾材，不需要取下整組濾網，相對輕量且安全性佳。第三，模組化外框可重復使用，更換簡易，與傳統(tǒng)三合一化學濾網形成極大反差。第四，因濾材與外框可重復使用，使購置成本減少40%以上、廢棄物減量60%以上，連帶降低廢棄物堆積與后續(xù)處理費用。第五，環(huán)保型濾網讓備品僅剩濾材，外框可多次使用到耗損才需補充。

銳智以3R--Reduce（減少）、Reuse（重復利用）、Recycle（回收利用）為核心理念，期望達到零廢棄物目標，世界正面臨氣候變遷、全球暖化、頻繁出現(xiàn)極端氣候等嚴峻的環(huán)境議題，所以人類不應以「再利用經濟」(仍會產生廢棄物)為滿足，需要更進一步達到「循環(huán)經濟」，務求100%利用原料資源、不再生成任何廢棄物，這正是濾能想要帶給產業(yè)的全新思維。

除致力發(fā)展模組化濾網外，銳智也積極推廣另一產品「一體式AMC化學過濾器」，將除酸性、堿性、TVOC等吸附和分解材料負載在一種夾碳布材料里面，做成一體化AMC化學過濾器，該產品可以同時高效去除將除酸性、堿性、TVOC、臭氧等AMC氣態(tài)污染物，同時產品的性價比較也是比較好，對環(huán)境更環(huán)保節(jié)能。

Eco-friendly combined filter semiconductor factory efficient control AMC and reduce the impact of carbon emissions

Many semiconductor factories are moving towards the process of intellectualization and are beginning to discover that there are micro-pollutants in the environment that are invisible to the naked eye, which are suspended in the air and cause great harm to products, but traditional filtration methods such as HEPA or ULPA are difficult to effectively remove. Contamination) problem.

According to Mr. Yu, the technical director of Filtration Energy, with the development of advanced semiconductor processes, the dust suspended in the air can be effectively controlled through traditional filtration methods; however, compared to dust, other organic or inorganic micro-pollutants have a greater impact on process yields. In other words, high performance AMC micro-pollution control technology is one of the key elements for semiconductor makers to develop 5nm advanced process.

AMC is mainly divided into MA acidic substances, MB salty substances, MC condensation substances and MD doping substances, and H2O2, O3 and other unclassifiable, these gaseous molecular pollutants, in terms of size, only 5 to 25 molecules deposited, can occupy the full 5 nm line width, resulting in damage to the wafer, which is currently the biggest problem faced by the semiconductor industry.

In order to solve this problem, the chemical filter industry in the traditional dust filter outside the superimposed multi-effect chemical filter, that is, the traditional three-in-one chemical filter module module. But it extends to a big problem, that is, the industry in order to ensure the high level of efficiency, so the use of a large number of PU glue to seal the filter in the metal frame, the PU glue itself will release the source of pollution, the second is due to the metal and the filter material is stuck and can not be replaced, and ultimately will only be reduced to a composite waste.

The environmental protection combined filter developed by Filter Energy presents a very different style. First of all, it does not use PU glue at all, so that users can save 3%~5% cost. Secondly, the frame is designed as a unique extraction type or stacking type, so that users only need to replace a single layer of filter material, not to remove the whole set of filters, which is relatively light and safe. Thirdly, the modular frame is reusable and easy to replace, which is a great contrast to the traditional 3-in-1 chemical filters. Fourth, the reusability of filter media and frames reduces the purchase cost by more than 40% and waste by more than 60%, which in turn reduces waste accumulation and subsequent disposal costs. Fifthly, the environmental protection filter allows only the filter media to be used as spare parts, and the outer frame can be used many times until it is worn out before replenishment.

"The world is facing severe environmental issues such as climate change, global warming, and frequent extreme weather, so mankind should not be satisfied with the "reuse economy" (which still generates waste), but needs to go further to achieve a "recycling economy", aiming to We need to go further to achieve a "circular economy" and strive to utilize 100% of raw material resources without generating any waste.

In addition to the development of modular filters, Filtration is also actively promoting another product, "Fluorochemical Coolant Leak Detection and Solution", to help foundries identify the source of contaminants more effectively. This is because foundries have to use Chiller in many machines, but the leakage during its use causes emerging sources of AMC contamination, and Filter Energy's solution is able to test the leakage point within one minute by using a manual probe to block AMC generation from the source.